High quality factor lamb wave resonators

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August undefined, 2024

WebApr 8, 2024 · The simulation results show that the structure can improve the instinct quality factor of the THz resonator to the order of 1 0 4 $1{0}^{4}$ when the bending radius is as small as 2mm. At the same time, sensitivity is increased by more than six times and uniform resonance curves are achieved from 0.45 ~ 0.55 $0.45\unicode{x0007E}0.55$ THz. WebDec 15, 2014 · In this report, basic analysis of the Lamb waves propagating in AlN and the device design techniques are presented in detail. Then, a novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an AlN plate formed in a butterfly …

AlN MEMS Resonator with High Quality Factor - IEEE Xplore

WebA high Figure-of-Merit (FOM) of 86.6 has been achieved for AlScN film based Lamb wave resonators below 1 GHz. The application potential of high scandium concentration … WebSep 7, 2024 · The demonstrated resonator has a typical resonant frequency fs and an antiresonant frequency fp. The quality factor and the piezoelectric coupling factor are two … bolton\\u0027s pharmacy watertown

Design of Piezoelectric MEMS Resonators and Oscillators__國立 …

WebMar 15, 2024 · Owning a superior quality factor ( Q) helps contribute to the advantages of microelectromechanical systems (MEMS) resonators due to its impact on the performance of MEMS technology-based oscillators and filters in IoTs and radio frequency applications. WebJun 21, 2024 · With proper pump frequency and pump power, the device quality factor is boosted in both simulation and experiment. The demonstrated Q-enhancement method is simple to implement and can be applied to other types of resonators that have nonlinear behavior and support multi-resonance operation. Authors: WebAlN MEMS Resonator with High Quality Factor Abstract: This paper reports a novel design on the notched supports coupled to the end of tethers to enhance the quality factor (Q … gmc dealers in north little rock ar

Thin-film lithium niobate-on-insulator (LNOI) shear horizontal …

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WebAs disclosed herein, methods of forming piezoelectric layers having alternating polarizations and related bulk acoustic wave filter devices. Pursuant to these embodiments, a method of forming a piezoelectric resonator device can include forming a first material, including metal and nitrogen atoms, using a first process to provide a first piezoelectric layer having the … WebJul 14, 2024 · The fabricated resonator shows a 2nd-order symmetric (S2) resonance at 3.05 GHz with a high quality factor (Q) of 657, and a large k2 of 21.5% and a 6th-order symmetric (S6) resonance at 9.05 GHz with a high Q of 636 and a k2 of 3.71%, both among the highest demonstrated for higher-order Lamb wave devices. bolton\\u0027s tobaccoWebJun 5, 2011 · We report an AlN-on-Si Lamb wave resonator with a unique wide acoustic bandgap (ABG) phononic crystal (PnC) structure at its anchors that provides an almost 4 … bolton\u0027s online

"Webmechanical-systems resonator with coexisting S0andS1 Lamb-wave modes of vibration. High performance (high quality factor Q and electromechanical coupling factor k2 t foraresonatorand low phase noise for an oscillator) has been achieved for both the resonator and oscillator in terms of dual-mode operation. In par- " - High quality factor lamb wave resonators

High quality factor lamb wave resonators

A novel piezoelectric RF-MEMS resonator with enhanced quality …

WebIn this paper, the design of a RF MEMS oscillator on a silicon-ceramic composite substrate using a high-Q Lamb-wave resonator as frequency-selective device is described. The MEMS resonator is designed on a 1.8 μm thick piezoelectric AlN layer, deposited on silicon using thin-film processes. WebMay 22, 2012 · A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 551 … An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1).

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WebApr 20, 2024 · This work investigates the design methodology to obtain large electromechanical coupling factor () and high quality factor ( Q) of shear-horizontal surface acoustic wave (SH-SAW) resonators based on the thin-film lithium niobate-on-insulator (LNOI) technology. WebSiddiqi, M.W.U.; Lee, J.E.-Y. Quality Factor Enhancement of AlN-on-Si Lamb Wave Resonators Using a Hybrid of Phononic Crystal Shapes in Anchoring Boundaries. In …

WebJun 1, 2024 · This study reports a novel AlN Lamb wave resonator (LWR) with anti-resonance quality factor (Qa) as high as 4,021 for the first time, indicating an ultra-low acoustic loss. Conventionally, resonance quality factor (Qr) is widely studied and used for various comparisons. WebNov 12, 2024 · The electrical admittance and the propagation losses are numerically investigated where a large band and a quality factor Q as high as 14 000 for S0 Lamb wave resonator with Copper Cu fingers are obtained. The obtained results show the novel properties of c-BN that contributes in enhancing the performances of Lamb wave …

WebMar 7, 2013 · These devices are of interest for applications in both frequency control and sensing. High quality factor Lamb wave resonators exhibiting low noise, low loss and … WebHome EECS at UC Berkeley

WebJan 6, 2015 · Jie Zou EECS Department University of California, Berkeley Technical Report No. UCB/EECS-2015-1 January 6, 2015 …

WebThis work focuses on the design and analysis of different Super High Frequency AlN-SOI FBAR resonators. The main idea used in this work to reduce the energy loss is the apodization principle. Various polygons and irregular shaped FBAR resonators are studied. The behavior of composite Thin film Piezoelectric on Substrate (TPoS) is examined in … bolton\u0027s tobaccoWebJan 5, 2024 · In this paper, we propose the design of a dual-mode Lamb wave resonator (DLWR) and a RF dual-passband filter based on DLWRs. The DLWR consists of a piezoelectric film and two IDT arrays with different thicknesses. Moreover, DLWRs with four different electrode configurations are analyzed. bolton\u0027s spicy chicken and fishWebSep 1, 2024 · In general, high quality factor (Q), large effective electromechanical coupling coefficient (k 2), high frequency ability, and spurious free response can be significant aspects for acoustic wave elements to enable low-loss filters, ... such as Lamb wave resonators and/or boundary wave resonators. For example, any suitable combination of ... bolton\u0027s spicy chicken nashvilleWebApr 11, 2024 · The newly developed filter solution is a high-performance XBAW ® RF filter and is being produced in Akoustis’ New York manufacturing facility. The A10159 is … bolton\u0027s towing davenport flWebThis paper investigates the strain distributions of fundamental and first-order Lamb wave modes (i.e. S 0, A 0, S 1, A 1 modes) associated with their piezoelectric transductions in a … gmc dealers in palm beach countyWebMay 15, 2024 · High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design High Quality … bolton\u0027s towing floridaWebJul 1, 2024 · In this paper, a systematical study is performed to analyze the quality factor, () and spurious modes of Lamb-wave resonators for the frequency above 2 GHz. The effect of the support tether width on the resonator's performance was studied through theoretical and experimental analysis. bolton\\u0027s towing davenport fl